Model 250 CVD Diamond Deposition Reactor

Overview

 
The Model 250 Hot Filament Reactor is a cost-effective R&D platform for researchers who want to take advantage of the wide deposition area and uniform process associated with sp3's Model 600 HF CVD System. The Model 250 comes with a 15kW DC power supply, safety interlocks, a filament tensioning array, and a planar deposition fixture. It is designed to integrate easily with laboratory supplied gas, vacuum, and control subsystems for user developed process recipes.
  • Water-cooled process chamber
  • Two-dimensional filament array with patented tension control mechanism
  • Large deposition area—250mm by 250mm
  • Two view ports plus two ports for metrology
  • 15kW DC supply with control interface
  • Easily interfaced to user supplied vacuum, gas supply and process control system
  • Interlocks for chamber vacuum, cooling water flow and chamber temperature prevent unsafe equipment operation
  • Patented reactor technology
Reactor Description Diamond Properties		 Model 250 Reactor
This photo shows the water-cooled process chamber of the Model 250 Reactor which is used in the fully integrated Model 600 System. The base enclosure houses the DC power supply, and provides ample space for user-furnished metrology, gas and vacuum components, and control electronics.

Reactor Availability

sp3 CVD Reactors are distributed worldwide by Seki Technotron, Tokyo, Japan.

 

Technology Availability

sp3 offers the opportunity to license its chemical vapor deposition
and diamond tool coating technologies.

For further information please call sp3 at:
(408) 492-0630 or (877) 773-9940, or
e-mail.
  For more information please contact:
Seki Technotron USA
2220 Martin Avenue, CA 95050-2704
(888) 273-6225; (408) 986-9190
fax (408) 986-9191; e-mail.
Or visit www.sekicvdsolutions.com