Summary specifications |
| Deposition rate: |
|
Up to 1.1 micron/hour (substrate geometry and recipe
dependent). |
| Deposition area: |
|
625 sq cm (250mm x 250mm). |
| Chamber ports: |
|
Two view ports plus two ports for metrology. |
| Filament array: |
|
2-dimensional array with tension control mechanism is
provided. |
| Power consumption: |
|
Approx. 15kW (exclusive of vacuum pump). |
| Vacuum pump: |
|
Pump is not included. |
| Safety: |
|
Hardware interlocks provided for chamber vacuum, cooling water
flow and chamber temperature. |
| Footprint: |
|
48 in. x 54 in. (117cm x 132cm). |
| Weight: |
|
1,100 lb (2,420 kg) approx. |
| Power input: |
|
208 VAC 3-phase, 5-wire, 70 Amp. |
| Cooling water: |
|
6 gpm at 40 psi drop, 20° maximum. |
| Access: |
|
24 in. (60cm) clearance at sides |
250 Reactor Description