Consistently Uniform Films
 A major advantage of
the sp3 hot-filament system is the ability to deposit a
coating of very uniform thickness over a broad area. Precise control of the
process parameters results in a ±10% variation in film thickness over
the entire deposition area of more than 144 square inches (93,000 mm²).
Run-to-run consistency is within ±20%.
By contrast, in
microwave and arcjet reactors the deposition target is typically a chuck with a
diameter of 6 or 8 inches (150 or 200 mm). The difference in thickness of the
deposited film from the center of the chuck to a span of 5 or 7 inches (130 or
180 mm) is on the order of 3:1, resulting in a substantial variation in the
coating thickness over a deposition area of under 50 square inches (32,000
mm²).
Uniformity within an insert or other cutting tool is also very
important. Hot spots, as often found in microwave and arcjet reactors, can
result in thickness variations of ±30%, corner to corner.
The Model 650's
precise temperature control avoids hot spots by providing even energy
distribution over each insert and across the entire load.
Overview
Reactor
Description
Applications
Deposition Control
Specifications |
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Hot filament film uniformity vs. arcjet and
microwave
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